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CMP22-C030-T2 : Deposition and characterization of coating based plasma PECVD polymerized of the films owing to the rate of nitrogen added to TMDSO
13 Dec 2022
16:15 - 16:30
Room 2, R2
Amel DILIMI et al.
CMP22-C030-T2 : Deposition and characterization of coating based plasma PECVD polymerized of the films owing to the rate of nitrogen added to TMDSO
